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Industrial Ultrasonic CLEANING & WELDING

Megasonic(Dura MQ)

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Megasonic(Dura MQ)

Features


Sub micron Particle Á¦°Å

1MHz ÀÌ»óÀÇ ÁÖÆļö·Î ¼öum~45nm±ÞÀÇ ÆÄƼŬ Á¦°Å¿¡ Ź¿ùÇÑ È¿°ú

Á¤¹Ð ¼¼Á¤

300mm, 450mm Wafer Single Process ¼¼Á¤
¹Ì¼¼ ¼¼Á¤ÀÌ ÇÊ¿äÇÑ Process

User interface

LCD Ç¥½Ãâ / ¾Ë¶÷ / Åë½Å ±â´É

Àû¿ëÁøµ¿ÀÚ

Rod Áøµ¿ÀÚ , ÄõÃ÷ Áøµ¿ÀÚ , Spot Shower


































Specification

MODELDURA 1MQDURA 2MQDURA 3MQ
ÁÖÆļö(MHz)1 MHz2 MHz3 MHz
Ãâ·Â(Watt)303030
¹ßÁø ¹æ½ÄÆÞ½º ¿À½Ç·¹ÀÌÅÍ¿¡ ÀÇÇÑ À§»óµ¿±â ¹æ½ÄÁµ¿Áµ¿
µ¿ÀÛ Ç¥½ÃBlue LCD (back light) , ÁÖÆļö, Ãâ·Â, »óÅ ǥ½ÃÁµ¿Áµ¿
Åë½ÅRS 422 ( Ãâ·Â Á¶Á¤ ¹× »óÅ , ¹ßÁø±â »óÅÂ) Áµ¿Áµ¿
»ç¿ë ÁÖº¯¿Âµµ0~40¡ÉÁµ¿Áµ¿
»ç¿ë ÁÖº¯ ½Àµµ0~80¡ÉÁµ¿Áµ¿
Å©±â(mm)210(W) X 250((L) X 130(H) Áµ¿Áµ¿
Áß·® (kg)2.5kgÁµ¿Áµ¿