- KR | EN
| MODEL | FINAL 세정기 M/C |
| Material | Si (Multi & Mono) |
| 크기 | 156X156mm (Other size on application) |
| 두께 | 160 micro (Other size on application) |
| 세정 용기 | Detergent with Ultrasonic |
| 헹굼 용기 | Rinse with Ultrasonic (High Frequency) |
| cassette | 50pcs/cassette X 4pcs =200pcs |
| 순환방식 | Circulation and Filtering |
| 생산력 | Over 2400pcs / Hr |
| 옵션 | Auto dosing station (Optional) |
| 건조공정 | Hot Air Blower (Special design for low wafer breakage) |
| 조작반 | 10 inch Touch Screen |
| 안전장치 | Over/level/limit sensor and interlock |
