Cleaning Unit for FPD Panel (LCD, OLED, Glass)
Features
Diversified Frequencies
frequencies covers from 40 kHz to 1.6 MHz depending on the size of particles.
Area Panel Response
Effective region of large area -> Currently being applied to G2~G8 lines
Optimization for Panel Cleaning
Optimized for panel cleaning of LCD, OLED, etc
Submicron
Outstanding effects can be obtained for cleaning of submicron contaminants
Direct-type Cleaning
Method for direct cleaning of the upper part of the panel's surface by installation in the upper part
Duratwin
Features
Diversified Frequencies
Frequencies covers from 500 kHz to 3 MHz
Upper side Cleaning Method
Method for direct cleaning of upper side surfaces by installation with small gap to product being cleaned
Precision Cleaning
Suitable for items requiring precision cleaning such as wafer, HDD, OLED, Mask etc.
Submicron
Outstanding effects can be obtained in cleaning of submicron contaminants
