Fine foreign objects removed without causing damage to the cleaning object
Easy Installation
Easily applied to existing production lines as an independent cleaning system
CE Certification
CE certified by TÜV Rheinland
Precision Cleaning
Fine cleaning process used for semiconductor wafers, HDDs, glass, OLED etc.
Digital Circuit Application
Outputs by the unit of 0.1 Watt Automatically Adjusted and Displayed by Application of Digital Circuits
Fine Contaminants Removal
Contaminants of higher than 45 nm class removed
User Interface
Easy outputting, setup of communication modes, etc. by using function keys on the front face
Loading of Communication Functions
Control and display of parameters via RS485
Protection Function of Output's Upper / Lower Limits
Damage to cleaning objects and cleaning defects due to a change in outputs can be prevented through the setup of upper / lower output limits
Status Display
Transducer status can be seen clearly through LCD window
Instrument Protection Function
Abnormalities in oscillator and transducer are detected and transmitted from contact point
Specification
