Business Field

transducer / Industrial cleaning technology / Ultrahigh precision technology

Megasonic(Dura MQ)

Damage-free cleaning realized by uniform megasonic sound pressures

Outstanding effects for removal of particles of a few um~45 nm class with frequencies over 1 MHz

Single process cleaning of 300 mm, 450 mm wafers; process requiring fine cleaning

LCD display window / alarm / communication function

Rod transducer, quartz transducer, spot shower

rep_photo

MODEL	DURA 1MQ	DURA 2MQ	DURA 3MQ
Frequency(MHz)	1 MHz	2 MHz	3 MHz
Output power(Watt)	30	30	30
Oscillation method	Phase alignment method by pulse oscillator	Phase alignment method by pulse oscillator	Phase alignment method by pulse oscillator
Operation display	Blue LCD (back light), frequency, output power, state display	Blue LCD (back light), frequency, output power, state display	Blue LCD (back light), frequency, output power, state display
Communication	RS 422 (Output power adjustment and state, oscillator state)	RS 422 (Output power adjustment and state, oscillator state)	RS 422 (Output power adjustment and state, oscillator state)
Ambient temperature of use	0~40℃	0~40℃	0~40℃
Ambient humidity of use	0~80℃	0~80℃	0~80℃
Size (mm)	210(W) X 250((L) X 130(H)	210(W) X 250((L) X 130(H)	210(W) X 250((L) X 130(H)
Weight (kg)	2.5kg	2.5kg	2.5kg