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Business Field

transducer / Industrial cleaning technology / Ultrahigh precision technology

Final Cleaner

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Business Field
Final Cleaner

Features

Features of Solar Wafer Cleaner include cleaning, rinsing, and drying processes implemented by placing wafers in the prepared cassette after pre-cleaning


Efficient Management

Optimized system configuration, efficient management of detergents and waste water

Multi-bath Type Ultrasonic Washing

Wafers washed and dried by a multi-bath type method, several stages of ultrasonic washing and rinsing processes

Fully Automatic Large Amount Washing

Washing of a large amount of wafers using a fully automatic method

User Interface (UI)

Optimum programs customized for users¡¯ environments








Specification

MODELFINAL CLEANER M/C
MaterialSi (Multi & Mono)
Size156X156mm (Other size on application)
Thickness160 micro (Other size on application)
Cleaning containerDetergent with Ultrasonic
Rinse containerRinse with Ultrasonic (High Frequency)
Cassette50pcs/cassette X 4pcs =200pcs
Circulation methodCirculation and Filtering
Production capacityOver 2400pcs / Hr
OptionAuto dosing station (Optional)
Drying processHot Air Blower (Special design for low wafer breakage)
Operation panel10 inch Touch Screen
Safety deviceOver/level/limit sensor and interlock