- KR | EN
■ Sapphire wafer 2 to 8 "cleaning -Ultrasonic Cleaning
■ Rinse - Dry Automatic Cleaning Process
■ Hot air drying type, MIR drying type
■ Servo robot system available
| MODEL | 6-BATH POLISHING AUTO MACHINE |
| Washing object | Sapphire Wafer 2/4/6/8 inch |
| Washing process | Ultrasonic washing and rinsing |
| Drying process | Hot spin drying method |
| Driving unit | UP/DOWN, automatic transfer |
| Capacity | Negotiation |
| Tack Time | 10 min |
| Option | Auto Dosing Unit, etc. |
| Elec. Control panel | 10 inch Touch Panel |
| Safety device | Over / Level / Limit sensor and Interlock |